Iterative Learning Control for Quasi-Static MEMS Mirror with Switching Operation
Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/Gutachten › Beitrag in Konferenzband › Beigetragen › Begutachtung
Beitragende
Abstract
This paper reports an iterative learning control (ILC) to compensate for the errors by the switching operation and the modeling inaccuracies for a quasi-static (QS) MEMS mirror. The modeling errors and uncertainties in dynamics with the switching operation between electrodes result in undesirable oscillations in beam positioning. A wideband frequency-domain ILC is proposed for a QS MEMS mirror with a flatness-based feedforward control. The improvement of the residual oscillations is demonstrated by reduced root mean square (RMS) errors for a 2 Hz and a 2-degree-amplitude sawtooth reference with a factor 69.9.
Details
| Originalsprache | Englisch |
|---|---|
| Titel | 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) |
| Erscheinungsort | München |
| Herausgeber (Verlag) | Institute of Electrical and Electronics Engineers (IEEE) |
| Seiten | 538-541 |
| Seitenumfang | 4 |
| ISBN (elektronisch) | 978-1-6654-9308-6 |
| ISBN (Print) | 978-1-6654-9309-3 |
| Publikationsstatus | Veröffentlicht - 2023 |
| Peer-Review-Status | Ja |
Publikationsreihe
| Reihe | IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
|---|---|
| Band | 2023-January |
| ISSN | 1084-6999 |
Konferenz
| Titel | 36th IEEE International Conference on Micro Electro Mechanical Systems |
|---|---|
| Kurztitel | MEMS 2023 |
| Veranstaltungsnummer | 36 |
| Dauer | 15 - 19 Januar 2023 |
| Webseite | |
| Ort | Science Congress Center Munich |
| Stadt | Garching bei München |
| Land | Deutschland |
Externe IDs
| ORCID | /0000-0003-3259-4571/work/142249669 |
|---|
Schlagworte
ASJC Scopus Sachgebiete
Schlagwörter
- Electrostatic Actuation, Iterative Learning Control, Quasi-Static MEMS Mirror, Switching Operation