Hafnium oxide as an enabler for competitive ferroelectric devices

Publikation: Beitrag zu KonferenzenPaperBeigetragenBegutachtung

Beitragende

  • Thomas Mikolajick - , Professur für Nanoelektronik, Technische Universität Dresden (Autor:in)
  • Halid Mulaosmanovic - , Technische Universität Dresden (Autor:in)
  • Patrick Lomenzo - , Technische Universität Dresden (Autor:in)
  • Michael Hoffmann - , Technische Universität Dresden (Autor:in)
  • Stefan Slesazeck - , Technische Universität Dresden (Autor:in)
  • Uwe Schroeder - , Technische Universität Dresden (Autor:in)

Abstract

Ferroelectric materials offer the promise to realize low power memory devices and show negative capacitance operation that could lead to novel electronic devices. Although intense research on realizing different memory device concepts based on three different readout schemes have been subject to intense research, the commercial success is limited to low density ferroelectric random access memories based on a direct capacitor readout. The complexity of integrating ferroelectric materials into CMOS processes has limited successful implementations. Ferroelectricity in hafnium oxide related material systems could overcome this limitations for memories and at the same time enable new devices based on negative capacitance.

Details

OriginalspracheEnglisch
Seiten1-2
Seitenumfang2
PublikationsstatusVeröffentlicht - Juni 2020
Peer-Review-StatusJa

Konferenz

Titel2020 IEEE Silicon Nanoelectronics Workshop, SNW 2020
Dauer13 - 14 Juni 2020
StadtHonolulu
LandUSA/Vereinigte Staaten

Externe IDs

ORCID /0000-0003-3814-0378/work/142256200

Schlagworte

Schlagwörter

  • FeFET, FeRAM, ferroelectric, FTJ, memory