Feasibility of 4H-SiC p-i-n Diode for Sensitive Temperature Measurements Between 20.5 K and 802 K

Publikation: Beitrag in FachzeitschriftForschungsartikelBeigetragenBegutachtung

Beitragende

  • Christian D. Matthus - , Professur für Schaltungstechnik und Netzwerktheorie, Fraunhofer Institute for Integrated Systems and Device Technology (Autor:in)
  • Luigi Di Benedetto - , University of Salerno (Autor:in)
  • Matthias Kocher - , Fraunhofer Institute for Integrated Systems and Device Technology (Autor:in)
  • Anton J. Bauer - , Fraunhofer Institute for Integrated Systems and Device Technology (Autor:in)
  • Gian Domenico Licciardo - , University of Salerno (Autor:in)
  • Alfredo Rubino - , University of Salerno (Autor:in)
  • Tobias Erlbacher - , Friedrich-Alexander-Universität Erlangen-Nürnberg (Autor:in)

Abstract

For the first time, we report on the performances of 4H-SiC p-i-n-diode temperature sensors for operating temperatures between 20.5 and 802 K. In this huge temperature range, three ranges of performance were identified with the limit temperatures at 78.2 and 176.3 K. In each of these ranges, a different dominant current transport mechanism is shown and in this paper, a detailed analysis and discussion are reported. The sensor performances were extracted from VD-T characteristics at different fixed ID values. In particular, at ID = 1 μA and in the temperature range between 78.2 and 802 K, we found a sensor sensitivity of 2.3-3.4 mV/K with a rms temperature error, eT, of less than 4.2 K and the sensor shows an excellent linearity-quantified by the coefficient of determination R2 higher than 0.9993. For even lower temperatures (below 78.2 K), low measurement currents like 10 nA are required leading to a sensitivity of 5.8 mV/K, but a lower linearity (R2 = 0.9095) and an rms temperature error of 9.7 K which makes the sensor only partially usable in the temperature range between 20.5 and 78.2 K. Finally, the sensor performances are compared with other state-of-the-art solutions.

Details

OriginalspracheDeutsch
Aufsatznummer8604048
Seiten (von - bis)2871-2878
Seitenumfang8
FachzeitschriftIEEE sensors journal
Jahrgang19
Ausgabenummer8
PublikationsstatusVeröffentlicht - 15 Jan. 2019
Peer-Review-StatusJa

Externe IDs

Scopus 85063250829

Schlagworte

Schlagwörter

  • Temperature sensors, Temperature measurement, Sensor phenomena and characterization, Temperature distribution, Voltage measurement