Fast forecasting of VGF crystal growth process by dynamic neural networks

Publikation: Beitrag in FachzeitschriftForschungsartikelBeigetragenBegutachtung

Beitragende

Abstract

Fast forecasting of process variables during the crystal growth is a critical step in a process development, optimization and control. The common approach based on computational fluid dynamics modeling is accurate, but too slow to deliver results in real time. Here we conducted a feasibility study on the application of dynamic artificial neural networks in the forecasting of VGF-GaAs crystal growth cooling program. Particularly, we studied various Nonlinear-AutoRegressive artificial neural networks with eXogenous inputs (NARX) with 2 external inputs and 6 outputs derived from 500 transient data sets. Data were generated by transient 1D CFD simulation. The first encouraging results are presented and the pros and cons of the application of dynamic artificial neural networks for the fast predictions of VGF process parameters are discussed.

Details

OriginalspracheEnglisch
Seiten (von - bis)9 - 14
FachzeitschriftJournal of crystal growth
Jahrgang521
PublikationsstatusVeröffentlicht - 2019
Peer-Review-StatusJa

Externe IDs

Scopus 85066255424
ORCID /0000-0002-4911-1233/work/142252542

Schlagworte

Schlagwörter

  • A1. Computer simulation, A1. Fluid flows, A2. Gradient freeze technique