ESD protection methodology for deep-sub-micron CMOS

Publikation: Beitrag in FachzeitschriftForschungsartikelEingeladenBegutachtung

Beitragende

  • K. Bock - , Interuniversitair Micro-Elektronica Centrum (Autor:in)
  • G. Groeseneken - , Interuniversitair Micro-Elektronica Centrum (Autor:in)
  • H. E. Maes - , Interuniversitair Micro-Elektronica Centrum (Autor:in)

Abstract

Electrostatic discharge is considered to be a serious treat of integrated CMOS circuits since the feature size reached about 1.5-1.0μm. Since then the scaling of CMOS technologies led to an increase of their ESD susceptibility based on geometrical, physical and technological limitations. The paper describes the change in methodology in order to assure a reasonably high target value of ESD protection with newly to be developed deep sub-micron feature size technologies. The backward adaptive conservative methodology is step by step replaced by a methodology considering the ESD issue already during process development and involving more predictive ESD-TCAD into the development cycle. It is concluded that the scaling based limitations might grow to a significant problem in the near future requiring significant effort to assure a reasonable ESD protection level for CMOS technologies, in particular if the high-frequency properties of such technologies should not be affected.

Details

OriginalspracheEnglisch
Seiten (von - bis)997-1007
Seitenumfang11
FachzeitschriftMicroelectronics Reliability
Jahrgang38
Ausgabenummer6-8
PublikationsstatusVeröffentlicht - 1998
Peer-Review-StatusJa
Extern publiziertJa

Externe IDs

ORCID /0000-0002-0757-3325/work/139064986