Does a Morphotropic Phase Boundary Exist in ZrxHf1-xO2-Based Thin Films?

Publikation: Beitrag in FachzeitschriftForschungsartikelBeigetragenBegutachtung

Beitragende

  • Pramoda Vishnumurthy - , Professur für Nanoelektronik, NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Richard Ganser - , Hochschule für angewandte Wissenschaften München (Autor:in)
  • Dong Gyu Kim - , Samsung (Autor:in)
  • Intak Jeon - , Samsung (Autor:in)
  • Chang Hwa Jung - , Samsung (Autor:in)
  • Hanjin Lim - , Samsung (Autor:in)
  • Thomas Mikolajick - , Professur für Nanoelektronik, NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Susan Trolier-McKinstry - , Pennsylvania State University (Autor:in)
  • Alfred Kersch - , Hochschule für angewandte Wissenschaften München (Autor:in)
  • Uwe Schroeder - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)

Abstract

ZrxHf1-xO2-based materials have attracted considerable interest due to their excellent scalability and compatibility with complementary metal-oxide-semiconductor technology. Following the discovery of ferroelectricity in these materials, it has opened new avenues not only redefining ferroelectric memory but also as a promising high-k dielectric for advanced non-volatile and volatile memory applications by utilizing specific crystalline phases to tune the electrical parameters. Various fundamental factors influencing the formation of ferroelectricity in ZrxHf1-xO2 have been identified and distinguished from those in the classical perovskite ferroelectrics. Notably, a sharp increase in the dielectric constant near 0 V observed in Zr-rich ZrxHf1-xO2 films achieved by tuning the fabrication parameters has been attributed to the presence of a morphotropic phase boundary. This study investigates 6 nm Zr-rich ZrxHf1-xO2 thin film metal-insulator-metal capacitors using a combination of experimental methods and machine learning-based molecular dynamics simulations. The study provides insight into the physical mechanisms that enhance the dielectric constant near 0 V and attributes it to the orthorhombic phase rather than a morphotropic phase boundary. The work discusses the limitations in the practical application of the high dielectric constant observed near 0 V. Additionally, it highlights similarities and differences between ZrxHf1-xO2 and the well-known morphotropic phase boundary in PbZrxTi1-xO3.

Details

OriginalspracheEnglisch
Aufsatznummere22802
FachzeitschriftAdvanced functional materials
PublikationsstatusElektronische Veröffentlichung vor Drucklegung - 26 Okt. 2025
Peer-Review-StatusJa

Externe IDs

ORCID /0000-0003-3814-0378/work/196677207

Schlagworte

Schlagwörter

  • hafnium–zirconium oxide, high-k dielectric, low voltage, morphotropic phase boundary, oxygen coordination, retention