Device and Method for Applying Pressure to Stress-Producing Layers for Improved Guidance of a Separation Crack

Publikation: Geistiges EigentumPatentanmeldung/Patent

Beitragende

  • Marko Swoboda - , Infineon Technologies AG (Erfinder:in)
  • Ralf Rieske - , Infineon Technologies AG (Erfinder:in)
  • Christian Beyer - (Erfinder:in)
  • Jan Richter - (Erfinder:in)
  • Siltectra GmbH

Abstract

The present invention relates to a method, according to claim 1, for separating at least one solid body layer (1), particularly a solid body disk, from a donor substrate (2). The method according to the invention comprises preferably at least the following steps: providing a donor substrate (2); producing or arranging a stress-producing layer (4) on a particularly flat surface (5) of the donor substrate (2) which axially defines the donor substrate (2); pressing at least one pressure application element (6) of a pressure application device (8) onto at least one pre-determined portion of the stress-producing layer (4), in order to press the stress-producing layer (4) onto the surface (5); separating the solid body layer (1) from the donor substrate (2) by thermally applying the stress-producing layer (4), thereby producing mechanical stress in the donor substrate (2), the mechanical stress creating a crack for separating a solid body layer (1), and the pressure application element (6) being pressed onto the stress-producing layer (4) during the thermal application of the stress-producing layer (4).

Details

The present invention relates to a method, according to claim 1, for separating at least one solid body layer (1), particularly a solid body disk, from a donor substrate (2). The method according to the invention comprises preferably at least the following steps: providing a donor substrate (2); producing or arranging a stress-producing layer (4) on a particularly flat surface (5) of the donor substrate (2) which axially defines the donor substrate (2); pressing at least one pressure application element (6) of a pressure application device (8) onto at least one pre-determined portion of the stress-producing layer (4), in order to press the stress-producing layer (4) onto the surface (5); separating the solid body layer (1) from the donor substrate (2) by thermally applying the stress-producing layer (4), thereby producing mechanical stress in the donor substrate (2), the mechanical stress creating a crack for separating a solid body layer (1), and the pressure application element (6) being pressed onto the stress-producing layer (4) during the thermal application of the stress-producing layer (4).

OriginalspracheEnglisch
IPC (Internationale Patentklassifikation)B28D 5/ 00 A I
VeröffentlichungsnummerUS2020215648
Anmeldedatum10 Aug. 2018
Land/GebietUSA/Vereinigte Staaten
Prioritätsdatum10 Aug. 2018
PrioritätsnummerWO2018EP71814
PublikationsstatusVeröffentlicht - 9 Juli 2020
Extern publiziertJa
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Externe IDs

ORCID /0000-0003-2572-1149/work/208796513