Device and Method for Applying Pressure to Stress-Producing Layers for Improved Guidance of a Separation Crack
Publikation: Geistiges Eigentum › Patentanmeldung/Patent
Beitragende
- Siltectra GmbH
Abstract
The present invention relates to a method, according to claim 1, for separating at least one solid body layer (1), particularly a solid body disk, from a donor substrate (2). The method according to the invention comprises preferably at least the following steps: providing a donor substrate (2); producing or arranging a stress-producing layer (4) on a particularly flat surface (5) of the donor substrate (2) which axially defines the donor substrate (2); pressing at least one pressure application element (6) of a pressure application device (8) onto at least one pre-determined portion of the stress-producing layer (4), in order to press the stress-producing layer (4) onto the surface (5); separating the solid body layer (1) from the donor substrate (2) by thermally applying the stress-producing layer (4), thereby producing mechanical stress in the donor substrate (2), the mechanical stress creating a crack for separating a solid body layer (1), and the pressure application element (6) being pressed onto the stress-producing layer (4) during the thermal application of the stress-producing layer (4).
Details
The present invention relates to a method, according to claim 1, for separating at least one solid body layer (1), particularly a solid body disk, from a donor substrate (2). The method according to the invention comprises preferably at least the following steps: providing a donor substrate (2); producing or arranging a stress-producing layer (4) on a particularly flat surface (5) of the donor substrate (2) which axially defines the donor substrate (2); pressing at least one pressure application element (6) of a pressure application device (8) onto at least one pre-determined portion of the stress-producing layer (4), in order to press the stress-producing layer (4) onto the surface (5); separating the solid body layer (1) from the donor substrate (2) by thermally applying the stress-producing layer (4), thereby producing mechanical stress in the donor substrate (2), the mechanical stress creating a crack for separating a solid body layer (1), and the pressure application element (6) being pressed onto the stress-producing layer (4) during the thermal application of the stress-producing layer (4).
| Originalsprache | Englisch |
|---|---|
| IPC (Internationale Patentklassifikation) | B28D 5/ 00 A I |
| Veröffentlichungsnummer | US2020215648 |
| Anmeldedatum | 10 Aug. 2018 |
| Land/Gebiet | USA/Vereinigte Staaten |
| Prioritätsdatum | 10 Aug. 2018 |
| Prioritätsnummer | WO2018EP71814 |
| Publikationsstatus | Veröffentlicht - 9 Juli 2020 |
| Extern publiziert | Ja |
Externe IDs
| ORCID | /0000-0003-2572-1149/work/208796513 |
|---|