Confocal microscopy for process monitoring and wide-area height determination of vertically-aligned carbon nanotube forests
Publikation: Beitrag in Fachzeitschrift › Forschungsartikel › Beigetragen › Begutachtung
Beitragende
Abstract
Confocal microscopy is introduced as a new and generally applicable method for the characterization of the vertically-aligned carbon nanotubes (VACNT) forest height. With this technique process control is significantly intensified. The topography of the substrate and VACNT can be mapped with a height resolution down to 15 nm. The advantages of confocal microscopy, compared to scanning electron microscopy (SEM), are demonstrated by investigating the growth kinetics of VACNT using Al 2 O 3 buffer layers with varying thicknesses. A process optimization using confocal microscopy for fast VACNT forest height evaluation is presented.
Details
Originalsprache | Englisch |
---|---|
Seiten (von - bis) | 477-487 |
Seitenumfang | 11 |
Fachzeitschrift | Coatings |
Jahrgang | 5 |
Ausgabenummer | 3 |
Publikationsstatus | Veröffentlicht - 1 Sept. 2015 |
Peer-Review-Status | Ja |
Schlagworte
ASJC Scopus Sachgebiete
Schlagwörter
- Chemical vapor deposition, Confocal microscopy, Forest height characterization, Optical imaging, Vertically aligned carbon nanotubes