Combined laser treatment of a solid body to be split

Publikation: Geistiges EigentumPatentanmeldung/Patent

Beitragende

  • Ralf Rieske - , Infineon Technologies AG (Erfinder:in)
  • Marko Swoboda - , Infineon Technologies AG (Erfinder:in)
  • Jan Richter - (Erfinder:in)
  • Siltectra GmbH

Abstract

The invention relates to a method for detaching at least one solid body layer (14) from a solid body (1), wherein by means of the modifications (2) a crack guiding region (4) is provided for guiding a crack in order to detach a solid body portion (6), in particular a solid body layer, from the solid body (1). The invention preferably comprises at least the steps: moving the solid body (1) relative to a laser application device (8), successively producing laser beams (10) by means of the laser application device (8) in order to produce respectively at least one modification (2), wherein the laser application device (8) is adjusted for defined production of modifications depending on at least one parameter, in particular the transmission of the solid body at defined locations and for a defined solid body depth, wherein inhomogeneities of the solid body (1) in the region of the affected surface and/or in the region of the affected volume of the solid body (1) can be compensated for by the adjustment of the laser application device (8), detaching the solid body layer (14) from the solid body (1).

Details

The invention relates to a method for detaching at least one solid body layer (14) from a solid body (1), wherein by means of the modifications (2) a crack guiding region (4) is provided for guiding a crack in order to detach a solid body portion (6), in particular a solid body layer, from the solid body (1). The invention preferably comprises at least the steps: moving the solid body (1) relative to a laser application device (8), successively producing laser beams (10) by means of the laser application device (8) in order to produce respectively at least one modification (2), wherein the laser application device (8) is adjusted for defined production of modifications depending on at least one parameter, in particular the transmission of the solid body at defined locations and for a defined solid body depth, wherein inhomogeneities of the solid body (1) in the region of the affected surface and/or in the region of the affected volume of the solid body (1) can be compensated for by the adjustment of the laser application device (8), detaching the solid body layer (14) from the solid body (1).

OriginalspracheEnglisch
IPC (Internationale Patentklassifikation)C03B 33/ 09 A I
VeröffentlichungsnummerUS2019099838
Land/GebietUSA/Vereinigte Staaten
Prioritätsdatum22 März 2017
PrioritätsnummerWO2017EP56789
PublikationsstatusVeröffentlicht - 4 Apr. 2019
Extern publiziertJa
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Externe IDs

ORCID /0000-0003-2572-1149/work/208796509