Tuning Hyrbrid Ferroelectric and Antiferroelectric Stacks for Low Power FeFET and FeRAM Applications by Using Laminated HSO and HZO films

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Tarek Ali - , Fraunhofer Institute for Electronic Nano Systems (Author)
  • David Lehninger - , Fraunhofer Institute for Electronic Nano Systems (Author)
  • Maximilian Lederer - , Chair of Experimental Physics / Photophysics, Institute of Applied Physics, Fraunhofer Institute for Electronic Nano Systems (Author)
  • Songrui Li - , Fraunhofer Institute for Electronic Nano Systems (Author)
  • Kati Kühnel - , Fraunhofer Institute for Electronic Nano Systems (Author)
  • Clemens Mart - , Fraunhofer Institute for Electronic Nano Systems (Author)
  • Konstantin Mertens - , Fraunhofer Institute for Electronic Nano Systems (Author)
  • Raik Hoffmann - , Fraunhofer Institute for Electronic Nano Systems (Author)
  • Ricardo Olivo - , Fraunhofer Institute for Electronic Nano Systems (Author)
  • Jennifer Emara - , Fraunhofer Institute for Electronic Nano Systems (Author)
  • Kati Biedermann - , Fraunhofer Institute for Electronic Nano Systems (Author)
  • Joachim Metzger - , Global Foundries, Inc. (Author)
  • Robert Binder - , Global Foundries, Inc. (Author)
  • Malte Czernohorsky - , Fraunhofer Institute for Electronic Nano Systems (Author)
  • Thomas Kämpfe - , Fraunhofer Institute for Electronic Nano Systems (Author)
  • Johannes Müller - , Global Foundries, Inc. (Author)
  • Konrad Seidel - , Fraunhofer Institute for Electronic Nano Systems (Author)
  • Lukas M. Eng - , Chair of Experimental Physics / Photophysics, TUD Dresden University of Technology (Author)

Abstract

The properties of hybrid ferroelectric (FE) and antiFE (AFE) films integrated in a single capacitor stack is reported. The stack lamination (4 × 5 nm) or (2 × 10 nm) using an Alumina (Al2O3) interlayer, material type (Si-doped HfO2 (HSO) and Zr doped HfO2 (HZO)), precursor condition (TEMA-Hf and Hf/ZrCl4), or dopant concentration (Si and Zr) are investigated for laminate stack properties. Optimized FE properties (higher 2Pr and a lower fraction of the monoclinic phase) are observed at (2 × 10 nm) laminates compared to a single 20 nm film thickness. The hybrid laminate stack as FE-FE, AFE-FE, DE-FE, or DE-AFE using (2 × 10 nm) based laminates are explored in terms of the output FE hysteresis (2Pr, 2Ec) and structural properties by X-ray diffraction. The hybrid AFE-FE stack shows the potential of tailoring the output FE hysteresis 2Ec by varying the fraction of the AFE phase. The hybrid AFE-FE stack is studied for the HSO and HZO materials at optimal FE content for the first laminate layer while varying the Si or Zr content to stabilize different degrees of an AFE phase in the second laminate layer. The superposition of the hybrid AFE-FE hysteresis shows a systematic 2Ec control. A model is developed to describe the tailored output FE hysteresis via the tuning of a hybrid AFE-FE stack. The role of stack lamination at hybrid-stabilized phases inside a single stack is explored with the aim for a controlled and optimized FE hysteresis shape toward a low power (2Ec) operation.

Details

Original languageEnglish
Article number2100837
JournalAdvanced electronic materials
Volume8
Issue number5
Publication statusPublished - May 2022
Peer-reviewedYes

External IDs

ORCID /0000-0002-2484-4158/work/142257564

Keywords

Keywords

  • antiferroelectric, ferroelectric, field effect transistor, FRAM, hafnium oxide, laminates

Library keywords