Peak Splitting and Bias Fields in Ferroelectric Hafnia Mediated by Interface Charge Effects

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Moritz Engl - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Wassim Hamouda - , Helmholtz Centre Berlin for Materials and Energy (Author)
  • Ines Häusler - , Helmholtz Centre Berlin for Materials and Energy (Author)
  • Suzanne Lancaster - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Luca Carpentieri - , Chair of Nanoelectronics, NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Thomas Mikolajick - , Chair of Nanoelectronics, NaMLab - Nanoelectronic materials laboratory gGmbH, TUD Dresden University of Technology (Author)
  • Catherine Dubourdieu - , Helmholtz Centre Berlin for Materials and Energy, Free University of Berlin (Author)
  • Stefan Slesazeck - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)

Abstract

The pristine state of hafnium-based ferroelectric devices exhibits various unwanted properties, such as imprinting and peak splitting, which diminish with bipolar cycling. The incorporation of a niobium oxide layer at different positions in metal–ferroelectric–metal and metal–ferroelectric–insulator–metal stacks is used to modify the pristine state of the device. X-ray photoelectron spectroscopy and transmission electron microscopy measurements are used to investigate the influence of niobium oxide on the zirconium hafnium oxide layer. It is hypothesized that the charged vacancies generated by introduced niobium oxide in the adjacent zirconium hafnium oxide layer result in an electric bias field that influences the pristine polarization state of the domains. A comparison of different stacks shows that peak splitting in the pristine state is most likely related to the formation of opposing electric bias fields in upward and downward polarized domains. Furthermore, the incorporation of niobium oxide in the zirconium hafnium oxide/aluminum oxide capacitor stack between the ferroelectric and insulating layer leads to a peak-splitting-free device without imprint, which could be explained by the increased influence of charge trapping near the zirconium hafnium oxide/niobium oxide and niobium oxide/aluminum oxide interfaces.

Details

Original languageEnglish
Pages (from-to)51468-51475
Number of pages8
JournalACS Applied Materials and Interfaces
Volume17
Issue number36
Publication statusPublished - 10 Sept 2025
Peer-reviewedYes

External IDs

PubMed 40856168
ORCID /0000-0003-3814-0378/work/193705556

Keywords

ASJC Scopus subject areas

Keywords

  • ferroelectric devices, hafnium zirconium oxide, interface engineering, niobium oxide, oxygen vacancies, peak splitting