Direct chemical vapor deposition of large-area carbon thin films on gallium nitride for transparent electrodes: A first attempt

Research output: Contribution to journal › Research article › Contributed › peer-review

Contributors

  • Jie Sun - (Author)
  • Matthew T Cole - (Author)
  • S Awais Ahmad - (Author)
  • Olof Backe - (Author)
  • Tommy Ive - (Author)
  • Markus Loffler - , Chalmers University of Technology (Author)
  • Niclas Lindvall - (Author)
  • Eva Olsson - (Author)
  • Kenneth BK Teo - (Author)
  • Johan Liu - (Author)
  • Anders Larsson - (Author)
  • August Yurgens - (Author)
  • Asa Haglund - (Author)

Details

Original languageEnglish
Pages (from-to)494-501
Number of pages8
JournalIEEE transactions on semiconductor manufacturing
Volume25
Issue number3
Publication statusPublished - 2012
Peer-reviewedYes
Externally publishedYes

External IDs

Scopus 84864681423

Keywords