Investigations of the fracture strength of thin silicon dies embedded in flexible foil substrates

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in KonferenzbandBeigetragenBegutachtung

Beitragende

Abstract

Mechanical stress induced by mechanical and thermal loading on thin silicon devices breaks the devices at a certain load called the fracture or breaking strength of the device. The displacement experienced by the dies, due to bending, at fracture strength is called the fracture displacement. The strength properties of thin, bare silicon dies have already been reported. This work extends the study further to demonstrate the improvement in the fracture strength of thin silicon dies, of three different thicknesses (30, 65 and 130 μm), when integrated in flexible foil substrates. The fracture strength of the dies was measured using uniaxial (3-point-bending test) and biaxial (Ring-ball test) bending tests. Experimental results of the fracture strength of thin, bare silicon dies were in good agreement with simulation results obtained from Finite Element Analysis (FEA). Experimental results showed that there was an increase of the fracture strength up to about 190% and an increase in the curvature of bending up to about 85% when silicon dies were integrated in flexible foil substrates. This increase in the fracture strength and curvature of bending can be useful in designing and manufacturing more mechanically robust flexible electronic devices.

Details

OriginalspracheDeutsch
Titel2014 IEEE 20th International Symposium for Design and Technology in Electronic Packaging (SIITME)
ErscheinungsortBucharest
Herausgeber (Verlag)IEEE Xplore
Seiten267-271
Seitenumfang5
ISBN (Print)978-1-4799-6962-3
PublikationsstatusVeröffentlicht - 26 Okt. 2014
Peer-Review-StatusJa

Publikationsreihe

ReiheInternational Symposium for Design and Technology of Electronics Packages (SIITME)
ISSN2642-7036

Konferenz

Titel2014 IEEE 20th International Symposium for Design and Technology in Electronic Packaging (SIITME)
Dauer23 - 26 Oktober 2014
OrtBucharest, Romania

Externe IDs

Scopus 84936149821
ORCID /0000-0002-0757-3325/work/139064855

Schlagworte

Schlagwörter

  • Silicon, Substrates, Stress, Finite element analysis, Reliability, Analytical models, Electronics packaging